Generating depfile fails with "Internal Compiler error"

Description
Generating a depfile with the -MF flag fails with "Internal Compiler error".

Steps to Reproduce
Sample shader:

[shader("pixel")]
float4 PSMain() : SV_Target0
{
    return float4(0, 0, 0, 0);
}

Try to compile with the following command:
dxc.exe -T lib_6_6 -spirv -fspv-target-env=vulkan1.3 -Zi -Fo shader.spv -MF shader.spv.d shader.hlsl

Actual Behavior
dxc prints "Internal Compiler error:" and returns -2147024809.
Removing the -MF flag (and the following path) works fine.

Environment

• DXC version: dxcompiler.dll: 1.9 - 1.8.2505.32 (b106a961d); dxil.dll: 1.9(1.8.2505.32)
• Host Operating System: Windows 11 x64

Start with the dxc.exe command from the reproduction, comparing compilation with and without the -MF flag. Trace depfile generation for the shown HLSL shader and Vulkan 1.3 target. Done means the command completes without the internal compiler error and produces the requested shader and depfile outputs.