Failed to parse source map

Run `yarn start` or `yarn build` output below warning:

```
WARNING in ./node_modules/timeago-react/esm/timeago-react.js
Module Warning (from ./node_modules/source-map-loader/dist/cjs.js):
Failed to parse source map from 'node_modules/timeago-react/src/timeago-react.tsx' file: Error: ENOENT: no such file or directory, open 'node_modules/timeago-react/src/timeago-react.tsx'

WARNING in ./node_modules/timeago.js/esm/format.js
Module Warning (from ./node_modules/source-map-loader/dist/cjs.js):
Failed to parse source map from 'node_modules/timeago.js/src/format.ts' file: Error: ENOENT: no such file or directory, open 'node_modules/timeago.js/src/format.ts'
@ ./node_modules/timeago.js/esm/index.js 10:0-34 10:0-34
@ ./node_modules/timeago-react/esm/timeago-react.js 51:0-52 113:4-10 118:6-12 124:4-10 143:16-22

WARNING in ./node_modules/timeago.js/esm/index.js
Module Warning (from ./node_modules/source-map-loader/dist/cjs.js):
Failed to parse source map from 'node_modules/timeago.js/src/index.ts' file: Error: ENOENT: no such file or directory, open 'node_modules/timeago.js/src/index.ts'
@ ./node_modules/timeago-react/esm/timeago-react.js 51:0-52 113:4-10 118:6-12 124:4-10 143:16-22

WARNING in ./node_modules/timeago.js/esm/lang/en_US.js
Module Warning (from ./node_modules/source-map-loader/dist/cjs.js):
Failed to parse source map from 'node_modules/timeago.js/src/lang/en_US.ts' file: Error: ENOENT: no such file or directory, open 'node_modules/timeago.js/src/lang/en_US.ts'
@ ./node_modules/timeago.js/esm/index.js 5:0-33 8:18-23
@ ./node_modules/timeago-react/esm/timeago-react.js 51:0-52 113:4-10 118:6-12 124:4-10 143:16-22

WARNING in ./node_modules/timeago.js/esm/lang/zh_CN.js
Module Warning (from ./node_modules/source-map-loader/dist/cjs.js):
Failed to parse source map from 'node_modules/timeago.js/src/lang/zh_CN.ts' file: Error: ENOENT: no such file or directory, open 'node_modules/timeago.js/src/lang/zh_CN.ts'
@ ./node_modules/timeago.js/esm/index.js 6:0-33 9:18-23
@ ./node_modules/timeago-react/esm/timeago-react.js 51:0-52 113:4-10 118:6-12 124:4-10 143:16-22

WARNING in ./node_modules/timeago.js/esm/realtime.js
Module Warning (from ./node_modules/source-map-loader/dist/cjs.js):
Failed to parse source map from 'node_modules/timeago.js/src/realtime.ts' file: Error: ENOENT: no such file or directory, open 'node_modules/timeago.js/src/realtime.ts'
@ ./node_modules/timeago.js/esm/index.js 11:0-44 11:0-44 11:0-44
@ ./node_modules/timeago-react/esm/timeago-react.js 51:0-52 113:4-10 118:6-12 124:4-10 143:16-22

WARNING in ./node_modules/timeago.js/esm/register.js
Module Warning (from ./node_modules/source-map-loader/dist/cjs.js):
Failed to parse source map from 'node_modules/timeago.js/src/register.ts' file: Error: ENOENT: no such file or directory, open 'node_modules/timeago.js/src/register.ts'
@ ./node_modules/timeago.js/esm/index.js 7:0-38 8:0-8 9:0-8 12:0-20
@ ./node_modules/timeago-react/esm/timeago-react.js 51:0-52 113:4-10 118:6-12 124:4-10 143:16-22

WARNING in ./node_modules/timeago.js/esm/utils/date.js
Module Warning (from ./node_modules/source-map-loader/dist/cjs.js):
Failed to parse source map from 'node_modules/timeago.js/src/utils/date.ts' file: Error: ENOENT: no such file or directory, open 'node_modules/timeago.js/src/utils/date.ts'
@ ./node_modules/timeago.js/esm/format.js 1:0-51 12:12-19 14:9-19
@ ./node_modules/timeago.js/esm/index.js 10:0-34 10:0-34
@ ./node_modules/timeago-react/esm/timeago-react.js 51:0-52 113:4-10 118:6-12 124:4-10 143:16-22

WARNING in ./node_modules/timeago.js/esm/utils/dom.js
Module Warning (from ./node_modules/source-map-loader/dist/cjs.js):
Failed to parse source map from 'node_modules/timeago.js/src/utils/dom.ts' file: Error: ENOENT: no such file or directory, open 'node_modules/timeago.js/src/utils/dom.ts'
@ ./node_modules/timeago.js/esm/realtime.js 1:0-71 19:8-18 31:2-12 41:18-28 57:14-30
@ ./node_modules/timeago.js/esm/index.js 11:0-44 11:0-44 11:0-44
@ ./node_modules/timeago-react/esm/timeago-react.js 51:0-52 113:4-10 118:6-12 124:4-10 143:16-22

```

## Environment

webpack 5.65.0
source-map-loader 3.0.0
node v16.13.1