Pg_basebackup error: COPY stream ended before last file was finished14 on Citus worker

Hi all,

I use PostgreSQL 15.6 and Citus 12.1
I try to set up replication on worker node with pg_basebackup like this:
` /usr/pgsql-15/bin/pg_basebackup -D /pgsql/15/data -Fp -R -X stream -c fast -C -S citusrepslot -P -h primary_ip -p 5432 -U replicauser `
But I hot error like this:
`pg_basebackup: initiating base backup, waiting for checkpoint to complete
pg_basebackup: checkpoint completed
pg_basebackup: write-ahead log start point: 47D/380000D8 on timeline 1
pg_basebackup: starting background WAL receiver
pg_basebackup: created replication slot "citusrepslot"
pg_basebackup: error: COPY stream ended before last file was finished14 )
pg_basebackup: removing contents of data directory "/pgsql/15/data"
`

In the same time, primary logs like this:
` > ERROR: invalid segment number 0 in file "insert_select_1_109835.data"
> STATEMENT: BASE_BACKUP ( LABEL 'pg_basebackup base backup', PROGRESS, CHECKPOINT 'fast', WAIT 0, MANIFEST 'yes', TARGET 'client')
`

I have 4 citus worker. I dont have any problem 3 of them. But I cannot create replication in 1 worker.
Is there any idea? Thank you.